Abstract

This study describes a new two-step process to cool the thermal vibration of microcantilevers. The process combines active mechanical feedback cooling and optical cavity cooling. A micro-Fabry–Perot interferometer, built in-house, is set atop a microcantilever to measure the vibration amplitude, the high optical power density of which induces cavity cooling in the optical cavity. Using a two-step cooling procedure, the equivalent temperature of the thermal vibration of a microcantilever is lowered from room temperature to the theoretical cooling limit of 0.063 K, a much lower temperature than that achieved via simple cavity cooling (18 K), and then by mechanical feedback cooling (0.135 K) obtained for the same type of microcantilevers in previous studies. This experimental demonstration showcases a new type of cooling process of the amplitude of thermal vibration for micro-mechanical resonators to a lower temperature and does not need additional cooling using a conventional cryogenic refrigerator.

Highlights

  • This study describes a new two-step process to cool the thermal vibration of microcantilevers

  • The second is active mechanical feedback damping of the vibration amplitude[11,12,13,14], in which only selected vibration modes are cooled down[15]

  • There have been a few trials with two-step cooling processes using initially a cryogenic means and mechanical feedback that have lowered the temperature of cantilevers[11]

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Summary

Introduction

This study describes a new two-step process to cool the thermal vibration of microcantilevers. The third is a self-cooling method called cavity damping by which the amplitude of a thermal vibration is damped using bolometric effects[16,17,18] or quantum effects[19]. There have been a few trials with two-step cooling processes using initially a cryogenic means and mechanical feedback that have lowered the temperature of cantilevers[11].

Results
Conclusion

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