Abstract
Cu/TaOx/Pt resistive devices can be switched by applying negative set voltages to the Cu electrode when a conductive oxygen bridge is established. When the area of device cell is larger than 100 um2, protrusions are optically observed in the devices during the electroforming process. The protrusion is believed to be the gaseous O2 produced during electro-oxidation reaction of O2- ions on the Pt electrode. For small device areas, protrusions are not observed as the gas may possibly leak out from the perimeter of the cell. The gas protrusion is indicative of O2- migration and the formation of oxygen vacancy nanofilaments in the solid electrolyte.
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