Abstract
This paper presents technology for the suppression of the mechanical coupling errors for an improved decoupled dual-mass micro-gyroscope (DDMG). The improved micro-gyroscope structure decreases the moment arm of the drive decoupled torque, which benefits the suppression of the non-ideal decoupled error. Quadrature correction electrodes are added to eliminate the residual quadrature error. The structure principle and the quadrature error suppression means of the DDMG are described in detail. ANSYS software is used to simulate the micro-gyroscope structure to verify the mechanical coupling error suppression effect. Compared with the former structure, simulation results demonstrate that the rotational displacements of the sense frame in the improved structure are substantially suppressed in the drive mode. The improved DDMG structure chip is fabricated by the deep dry silicon on glass (DDSOG) process. The feedback control circuits with quadrature control loops are designed to suppress the residual mechanical coupling error. Finally, the system performance of the DDMG prototype is tested. Compared with the former DDMG, the quadrature error in the improved dual-mass micro-gyroscope is decreased 9.66-fold, and the offset error is decreased 6.36-fold. Compared with the open loop sense, the feedback control circuits with quadrature control loop decrease the bias drift by 20.59-fold and the scale factor non-linearity by 2.81-fold in the ±400°/s range.
Highlights
The silicon micro-gyroscope, which is a micro-inertial sensor based on micro-electro- mechanical system (MEMS) technology, has undergone 20 years of research and development [1,2,3,4]
Results shown in Figure evaluate the correction of the quadrature correction comb
An improved decoupled dual-mass micro-gyroscope (DDMG) for mechanical coupling error suppression is presented in the paper
Summary
The silicon micro-gyroscope, which is a micro-inertial sensor based on micro-electro- mechanical system (MEMS) technology, has undergone 20 years of research and development [1,2,3,4]. The initial silicon micro-gyroscopes that mostly had a single mass cannot distinguish the Coriolis acceleration from the linear acceleration interference in the sensitive axis. To suppress the influence of acceleration or vibration, many researchers have studied the dual-mass silicon micro-gyroscope [5,6,7]. The differential sense capacitors in the dual-mass silicon micro-gyroscopes extract the anti-phase movement of a dual mass in the Coriolis acceleration and suppress the in-phase dual mass movement in the linear acceleration interference. The earlier silicon micro-gyroscopes had coupling structures between the drive mechanism and sense mechanism, which led to mechanical coupling between the two modes [8,9]. In [8], the inherent nonlinearity of the parallel plate actuators along the drive and sense axis directions was adopted to tune out the mechanical coupling error resulting from non-ideal stiffness
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