Abstract
Elastic-plastic properties of thin films deposited on elastic-plastic substrate were extracted using numerical nanoindentation tests from the force-displacement curve. In order to limit the substrate effect on measuring thin film elastic-plastic properties, three theoretical models were studied in this work. All these models use a parametric identification method based on dimensional and finite element analyses to extract relationships between the indentation parameters and the elastic-plastic properties of the film and the substrate. The mechanical properties of several thin films were identified using these models.
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