Abstract
The optimum design of MEMS based on ferroelectric thin films requires knowledge of the mechanical properties of the films. This means not only of their elastic coefficients, but also of the stability of the ferroelastic domains under stresses, and of their plastic and fracture behaviour. We present here a procedure using nanoindentation with a spherical indenter geometry capable of providing the elastic, anelastic and plastic contributions to the deformation of a film as a function of the indentation force. The procedure was tested on two lanthanum modified lead titanate ferroelectric thin films. The indentation stiffness coefficient of the films was found to be 130 GPa for both. The probable ferroelastic origin of the anelastic deformation is discussed. Pore compaction was found to be a major source of permanent deformation.
Published Version
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