Abstract
A new type of high-entropy alloy, a nitride-based (AlCrTiZrMo)N/ZrO2 nano-multilayered film, was designed to investigate the effect of ZrO2 layer thickness on the microstructure, mechanical properties, and thermal stability. The results show that when the thickness of the ZrO2 layer is less than 0.6 nm, it can be transformed into cubic-phase growth under the template effect of the (AlCrTiZrMo)N layer, resulting in an increased hardness. The (AlCrTiZrMo)N/ZrO2 film with a ZrO2 layer thickness of 0.6 nm has the highest hardness and elastic modulus of 35.1 GPa and 376.4 GPa, respectively. As the thickness of the ZrO2 layer further increases, ZrO2 cannot maintain the cubic structure, and the epitaxial growth interface is destroyed, resulting in a decrease in hardness. High-temperature annealing treatments indicate that the mechanical properties of the film decrease slightly after annealing at less than 900 °C for 30 min, while the mechanical properties decrease significantly after annealing for 30 min at 1000–1100 °C. The hardness and elastic modulus after annealing at 900 °C are still 24.5 GPa and 262.3 GPa, showing excellent thermal stability. This conclusion verifies the “template” effect of the nano-multilayered film, which improves the hardness and thermal stability of the high-entropy alloy.
Highlights
In 2004, Yeh et al [1] and Cantor et al [2] proposed a multi-component high-entropy alloy (HEA)
Schwarz et al [31] studied the composition of a CoCrFeNi high-entropy alloy using different methods, and they found that the stoichiometry, phase composition, and microscopic structure of the as-deposited HEA thin films are almost identical if the same deposition parameters are used
In this study, (AlCrTiZrMo)N is selected as the template layer of the nano-multilayered film, and ZrO2 is used as the modulation layer. (AlCrTiZrMo)N/ZrO2 nano-multilayered films with different ZrO2 layer thicknesses are prepared, which is expected to improve the mechanical properties and high-temperature resistance of the (AlCrTiZrMo)N/ZrO2 nano-multilayered film
Summary
In 2004, Yeh et al [1] and Cantor et al [2] proposed a multi-component high-entropy alloy (HEA). At low nitrogen flow rates, the film exhibited an amorphous structure, and when the flow rate increased to 4 sccm (standard-state cubic centimeter per minute) or higher, the films presented a columnar structure of the fcc phase, and the hardness and elastic modulus reached the maximum values of 23.8 GPa and 267.3 GPa, respectively. Zirconia (ZrO2) is a type of ceramic material that has three structures, namely, monoclinic, tetragonal, and cubic phases, and it has high hardness, elevated temperature resistance [39], and low thermal conductivity [40]. The addition of a ZrO2 layer into a nano-multilayered film is expected to improve the thermal stability and mechanical properties by magnetron sputtering. (AlCrTiZrMo)N/ZrO2 nano-multilayered films with different ZrO2 layer thicknesses are prepared, which is expected to improve the mechanical properties and high-temperature resistance of the (AlCrTiZrMo)N/ZrO2 nano-multilayered film In this study, (AlCrTiZrMo)N is selected as the template layer of the nano-multilayered film, and ZrO2 is used as the modulation layer. (AlCrTiZrMo)N/ZrO2 nano-multilayered films with different ZrO2 layer thicknesses are prepared, which is expected to improve the mechanical properties and high-temperature resistance of the (AlCrTiZrMo)N/ZrO2 nano-multilayered film
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