Abstract
The mechanical and tribological properties of tantalum and its alloy films are greatly influenced by their phase transformation. In this study, Ta and Ta-Ag films were prepared on carbon steel substrate by DC magnetron sputtering with various sputtering powers. The amorphous and nanocrystalline Ta and Ta-Ag film were produced at different sputtering powers from 40 to 110 W. The frictional properties of Ta and Ta-Ag films were investigated by rubbing against Si3N4 ball from RT to 700 °C. The nanocrystalline Ta-Ag films shows higher hardness values (12 GPa) compared with amorphous phase. The nanocrystalline Ta90-Ag8 film shows a low friction coefficient of about 0.20-0.30 when rubbing against Si3N4 ball at 700 °C. The segregation of Ag can effectively reduce friction coefficients of Ta-Ag film at 700 °C. The Ta-Ag films show high structure stability even after friction at 700 °C.
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