Mechanical analysis of lateral uplift of aluminum film scribed by grating

Abstract

During the diffraction grating scoring process, the stress change on the aluminum film greatly affects the groove morphology. In view of the current status of “trial and error” of grating scoring, in order to study the rule of lateral bulging of aluminum film in the process of grating scoring, this paper aims at the formation rule of groove topography during the process of grating scoring, which is affected by the change of the surface film material force. The slip line field theory and the speed upper limit field theory establish a simple model for the stress process of the material during the scoring process.