Abstract
This paper proposes a scanning distance measuring interferometer (SDMI) method to measure the transmitted wavefront of large-aperture flat optics accurately. The biaxial positioning mechanism moves the test component through the interferometric path of a differential distance-measuring interferometer; both the optical path difference and distribution are obtained; thus, the wavefront can be reconstructed. A Ø360 mm flat optical substrate is measured, and the result is compared with a phase measuring interferometer (PMI). The SDMI result is 68 nm in PV and 13 nm in RMS. The PMI result is 90.8 nm in PV and 16.4 nm in RMS. The forms of the two results show a good correlation, which gives confidence in the viability of the SDMI method for large-aperture optical transmitted wavefront measurements out of range of the commercial PMI.
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