Measuring the Process Parameters of the IBAD Method

M Zoriy,D Palamarchuk,F Černý,S Konvičková,I Hüttel

doi:10.14311/396

Abstract

Chromium nitride films are known as good protective layers for against both corrosion and wear. These coatings have been studied in detail during recent years. Their protective capability strongly depends on the deposition conditions. A modern method for preparing chromium nitride is the IBAD (Ion Beam Assisted Deposition) method. The main parameter determining the composition and properties of the films prepared by the IBAD method is the arrival ratio of impinging nitrogen ions to chromium atoms. In order to calibrate the ion beam XY-mechanical scanner with a Faraday cup, a detector was designed and constructed. By mathematical processing of the data, the flux of the nitrogen atoms was found. To obtain the flux of the chromium atoms the RBS and Talystep methods were used. Now, on the basis of this data, we can perform CrNx, coatings with controlled composition and properties.

Highlights

In recent years the hard coatings have play a major role in mechanical engineering
Eflective modern methods are based on plasma and ion beam processing technology
The TECVAC 221 Ion Implanter has no suitable measuring instrument for this, so we made an appropriate device ourselves and used it to perform the calibration of the ion beam

Summary

Introduction

In recent years the hard coatings have play a major role in mechanical engineering. Hard coatings are used to increase resistance against wear and fatigue. The hardness and friction properties of chrrcmium nitride coatings depend on the structute and orientation of the crystals in the film [3]. The corrosion properties depend on the porosity/densitv of the coatings [4]. Eflective modern methods are based on plasma and ion beam processing technology. One of these is the IBAD method [5]. It involves deposition of a desired material using a vacuum electron beam evaporation technique and simultaneous bombardment by an energetic ion beam. Chromium nitride has nvo stoichiometric modifications - CrN and CrrN [6]. We need to calibrate the deposition subprocesses - the atomic fluxes of chromium and nitrogen in IBAD equipment

Calibration of an ion beam

50 Y-diE mm

Calibration of the electron beam evaPoration system

Conclusions