Abstract
AbstractHighly homogeneous glasses and crystalline materials such as CaF2 (calcium fluoride) are used in microlithographic applications. Inherent stresses in the material induced in manufacture lead to stress birefringence and thus to imaging errors, which is undesirable for semiconductor manufacture in view of the ever smaller structure sizes. Materials from which optical components for wafer steppers are manufactured must therefore also satisfy high requirements with regard to inherent stresses.
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a callDisclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.
