Measurements of the Ion-Beam Current Distribution over a Target Surface under a High Bias Potential

Abstract

A technique for direct measurements of the current distribution over the surface of a target that is at a negative bias potential relative to the ground was developed and tested. Measurements were performed using a six-channel meter that transmitted the measured data through a wireless Bluetooth acquisition system. The trace of an ion flow on the target surface was visualized by the method of luminous beams. Examples of the measured current distributions on a target surface depending on the geometric and physical parameters of the ion-optical system of a Penning plasma source are presented.