Abstract
A technique for direct measurements of the current distribution over the surface of a target that is at a negative bias potential relative to the ground was developed and tested. Measurements were performed using a six-channel meter that transmitted the measured data through a wireless Bluetooth acquisition system. The trace of an ion flow on the target surface was visualized by the method of luminous beams. Examples of the measured current distributions on a target surface depending on the geometric and physical parameters of the ion-optical system of a Penning plasma source are presented.
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