Abstract
An ultrasonic micro-spectrometer to measure the spectra at a small surface area by focusing the ultrasonic wave is described. In this system, a sensor unit consists of a transmitter with a spherical lens and a receiver with a planar lens. The former converges the ultrasonic wave to achieve a high spatial resolution and the latter receives specific angular components from a reflected wave. Acoustic images obtained by scanning a printed wiring board with this sensor show a high spatial resolution with burst waves. The phase velocities of surface acoustic waves which were excited on solids were measured by impulsive waves.
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