Abstract
The notion of an effective longitudinal coherence length with its value much greater than has been adopted in small-angle X-ray scattering communities for years, where and denote the incident wavelength and its spread, respectively. Often the implications of the effective longitudinal coherence length do not even enter considerations in the designing and data treatment of small-angle scattering experiments. In this work, conventional transmission small-angle X-ray scattering (tSAXS) was performed to reveal a clear angular dependence on effective longitudinal coherence length. The measured values of effective longitudinal coherence length can be as high as one millimeter, whereas the value of calculated is in nanometers.
Highlights
In light of an ever-shrinking feature size and the increasing complexity of 3D architecture of today’s integrated circuit (IC) devices, the need for metrology tools with a sub-nanometer resolution and a great penetration power has been a major challenge for IC chip manufacturers
The transmission small-angle X-ray scattering (tSAXS) experiments for the evaluation of the effective longitudinal coherence length were performed at beamline TLS 23A of the National Synchrotron Radiation Research Center (NSRRC)
The best-fit effective longitudinal coherence length, ξ0 (θ), at all four peak positions is significantly greater than 4.13 nm, calculated from ξ = λ2 /(2∆λ), by several orders of magnitude
Summary
In light of an ever-shrinking feature size and the increasing complexity of 3D architecture of today’s integrated circuit (IC) devices, the need for metrology tools with a sub-nanometer resolution and a great penetration power has been a major challenge for IC chip manufacturers. Technology Roadmap for Semiconductors (ITRS) roadmap [1], as potential solutions for measuring nanoscale features because of their sub-nanometer resolution and great penetration power. Transmission small-angle X-ray scattering (tSAXS), one of the X-ray based methods, has been extensively studied to determine its 3D feature dimensions even in high-aspect-ratio nanostructures. Most work has been performed using a synchrotron X-ray source for its high-beam flux or high brilliance, which enables tSAXS measurements of samples with a minuscule scattering volume [3,4,5,6].
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