Measurements and calculations of the electron distribution function in the electronegative plasma of a hollow-cathode discharge in N2: SF6 mixtures

Abstract

Results are presented from measurements and numerical calculations of the electron energy distribution function in the plasma of a hollow-cathode glow discharge in N2: SF6 mixtures. It is shown that, when a small amount of SF6 is added to nitrogen, the number of electrons in the inverse region of the distribution function (2–6 eV) increases by about one order of magnitude. As the electric field in plasma increases to ≈0.5 V/cm, the dip in the distribution function disappears and the inversion region vanishes.