Abstract
Time constant is an important property of the continuous flow systems that can be used to estimate the dynamic equilibrium time for the reaction vacuum chamber of such systems. This work is concerned with measurements and analysis of time constant of a dynamic flow control system assembled at the KRISS vacuum laboratory. Being a new system, it was important to know some basic characteristics of the system, including the time constant as well, in the pressure range of 0.1–133Pa during continuous gas flow. Three types of gases were used for this purpose and the results were compared. It was observed that time constant was dependent on pressure across the conductance-reducer (CR) that was installed in the by-pass pumping line of the system. At low upstream pressures, the time constant was large and vice versa.
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