Measurement Uncertainty of Highly Asymmetrically Curved Elliptical Mirrors Using Multi-Pitch Slope Stitching Technique

Abstract

Soft X-ray off-axis elliptical mirrors bring new challenges for X-ray mirror metrology. These highly asymmetrically curved elliptical cylindrical mirrors with a total slope range >10 mrad are extremely challenging to measure. Their total slope range exceeds the measuring range of most angular sensors used for X-ray mirror inspection. To overcome this problem, it is possible to stitch partial slope data by measuring the mirror at different pitch angles (multi-pitch angles). By revisiting the theory of the multi-pitch Nano-accuracy Surface Profiler (NSP), we derive the sampling position error on the mirror surface as a function of the mirror height profile and the measurement error of the pitch rotation center. When measuring “extreme”, highly asymmetrically curved, elliptical mirrors, the calculation of the mirror height profile with iterative reconstruction outperforms the classical “flat assumption” (i.e., assuming that the mirror sag is negligible). As demonstrated by our simulations, a proper tolerance evaluation on the measurement of pitch rotation center is needed to assess the measurement accuracy (systematic error) for these strongly aspherical mirrors using the multi-pitch NSP technique. Taking a real design of an “extreme” elliptical mirror as a case study, we conduct a Monte Carlo simulation to mimic the measurement and characterization process to analyze the impact of several error sources. With the measurement uncertainty of the pitch rotation center, the multi-pitch NSP measurement can estimate the grazing angle θ and the chief ray location xo with their uncertainties, as well as the slope residuals.