Abstract
Abstract The requirements on the precision lengths measurement rises due to the rapid technical development, in particular of nanotechnologies and precision optics. According to the roadmap “Dimensional metrology for micro- and nanotechnologies” of the European National Metrology Institutes EURAMET: Science and Technology Roadmaps for Metrology, https://www.euramet.org/Media/docs/Publications/roadmaps/ EURAMET$_$Science$_$and$_$Technology$_$Roadmaps$_$for$_$Metrology.pdf in the next few years “traceable 2D (3D) metrology at (sub)-nm accuracy over several 100 mm range” will be required. Circumstantial measurement uncertainty considerations can supply a crucial contribution to realize these ambitious requirements.
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