Abstract
An electromechanical mixing technique has been demonstrated for accurately measuring the performance of sub-optimal (e.g., insufficiently small capacitive gap, limited dc-bias), high-frequency, high-Q micromechanical resonators under conditions where parasitic effects could otherwise mask motional output currents. The technique employs the nonlinear voltage-to-force transfer function inherent in capacitive transducers, allowing an off-resonance input signal to mix down to a force at the resonance frequency and drive a resonator into vibration. Using this technique, a Q of 9,400 was measured for a non-optimal 156MHz disk resonator—3X higher than the false 3,090 obtained when parasitic feed-through is allowed to influence the frequency response.
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