Abstract
By detecting the resonant frequency shift caused by an attached particle before and after film deposition, the Young's modulus and either mass density or thickness of a patterned thin film can be determined. Furthermore, for a film characterization, the particle mass does not need to be known and its attachment position can be either measured or calculated from consecutive resonant frequency shifts: two for bridge and three for cantilever. The applicability of mass sensors in film characterization has been confirmed by comparing predictions with recent experiments.
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