Abstract

This paper presents a brief review of methods for the measurement of two-dimensional doping profiles. The main focus is on methods that have been actually been used to measure 2D profiles with acceptable accuracy and sensitivity. A comprehensive historical review is beyond the scope of this paper, and for this the reader is referred to an earlier paper which exhaustively cites work in the 2D dopant-profile measurement area.

Talk to us

Join us for a 30 min session where you can share your feedback and ask us any queries you have

Schedule a call

Disclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.