Abstract
A halogen lamp and an acousto-optic tunable filter are used to construct a sinusoidal wavelength-scanning interferometer with the scanning width of 210 nm. A linear wavelength-scanning with the scanning width of 220 nm is utilized to determine amplitudes of three different interference signals produced from multiple-reflection lights by front and rear surfaces of a thin film. Amplitudes of time-varying phases produced by a sinusoidal wavelength-scanning and constant phases in the interference signals are estimated by minimizing a difference between detected signals and theoretical ones. From the estimated values, the positions of the front and rear surface of the thin film with a thickness of about 460 nm are measured with an error less than 4 nm.
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a callDisclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.
