Abstract

Advanced Device Technology, University of Science & Technology, 305-350, Daejeon, KoreaReceived March 19, 2016; revised March 31, 2016; accepted March 31, 2016Abstract The surface flatness of metal meshes in a deflector of particle beam mass spectrometer (PBMS) requiredideally flat, and this can specify the particle trajectories which goes through the detector. In this research, chargedparticle current was measured using the different surface roughness deflectors. NaCl particles were generatedmonodispersed in its size by using differential mobility analyzer and the whole processes were followed the waycalibrating PBMS. The results indicate that the mesh surface morphology in the deflector can affect to the particle sizeand the concentration errors, and sensitivity of PBMS.Keywords: PBMS, Deflector, Nickel mesh, Electric field, Flatness

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