Measurement of the Finish of Diamond-Turned Metal Surfaces By Differential Light Scattering

Abstract

This paper discusses the measurement of the finish of diamond-turned surfaces by differential light scattering. Experimental scattering data are analyzed by electromagnetic theory to give the two-dimensional power spectral density of the surface roughness. These spectral densities are direct functional measures of the surface quality, and may be characterized in terms of topographic finish parameters. These parameters can then be used to specify surface finish, to predict scattering under a variety of conditions, and to aid in studies of other functional properties of these surfaces. Scattering spectra are separated in-to three groups corresponding to three classes of surface roughness: periodic tool marks and one- and two-dimensional random roughness. Periodic tool marks give rise to discrete diffraction lines in the scattering spectrum and are characterized by their surface periods and their Fourier amplitudes. Random one- and two-dimensional roughness give rise to one- and two-dimensional continua underlying the diffraction lines and are characterized by band-limited values of the rms surface heights and slopes, and transverse length parameters. Using HeNe light, vertical roughnesses are measured from a fraction of an Angstrom to several hundred Angstroms, for transverse spatial wavelengths from a fraction of a micron to several hundred microns. We re-view experimental techniques for making these measurements with emphasis on the scatterometer developed in our laboratory, which uses a fixed source-detector geometry and a rotating sam-ple. Results are illustrated by a number of scattering spectra taken with this instrument.