Abstract
In this paper a method for separate measurement of the extinction of optical thin films is presented. The method combines a laser calorimetric technique and a light-scattering goniophotometer. As an example, the spectral extinction properties of r.f. reactively sputtered TiO 2 films were measured. Under certain conditions absorption indices of 10 -5 or less can be achieved. Thus light scattering, rather than absorption, is the dominant optical loss mechanism in sputtered TiO 2 films.
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