Measurement of the conductivity of nonuniform semiconductor layers by a probe method

Abstract

The paper deals with the study, by a 4-probe method, of semiconductor layers which are non-uniform in depth. The appropriate boundary conditions in electrodynamics are solved and equations are obtained which enable the average values of the electric conductivity to be calculated from the results of 4-probe measurements. It is shown how to use the equations to measure the surface conductivity of semiconducting layers and to determine how this quantity varies.