Abstract
A time-of-flight technique was employed to determine the velocity distributions of particles sputtered from polycrystalline copper targets by a 1- to 5-keV pulsed Cs+-ion beam. Velocity spectra were obtained for sputtered atoms having velocities greater than 2×106 cm/sec and for sputtered ions having velocities less than 3×106 cm/sec. In all cases, the target surface normal bisected the 64° angle between the detector and the incident ion beam, the target temperature was 20°C, and the flight path was 40 cm. Analytical models were fitted to the time-of-flight data. High-velocity emission was found to be described best by binary collisions at the target surface and low-velocity emission by Maxwellian distributions with temperatures predicted by C. H. Townes's theory of sputtering. It is proposed that the binary collisions (high-velocity particles) are responsible for preferred angular emission along close-packed crystallographic directions and that the low-velocity particles are responsible for the cosinusoidal component of the angular distribution.
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