Abstract
We proposed the measurement system of the six degree of motion errors which is based on distance measurement by the laser interferometer. The system has six parallel laser beams and six ball lenses as the retroreflectors on the linear stage, which reflect the corresponding laser beams. In the proposed system, the error of axial direction is measured with the ordinary distance measurement method by laser interferometer. The vertical errors to the axial direction and the roll errors around the optical axis are measured by tilted beams using the wedge prism. The pitch and yaw errors in the vertical plane to the optical axis are measured by the difference between distance of two ball lenses. The former system can measure the displacement and the error angle in one-direction. The propose system are expanded and bi-directional displacement and error angle can be measured. In this paper, it is shown how to expand the measurement system. As a result, the maximum displacement errors in x, y and z directions are 242nm, 179nm and 90nm. The maximum rotational errors around x, y, z axes are 1.75 arcsec, 2.35 arcsec and 1.67 arcsec.
Highlights
Six Degree-of-freedom (6DOF) motion errors of a linear stage of a machine tool, a coordinate measuring machine and so on should be measured simultaneously in order to improve their accuracies
The moving plate (MP) which consisted of six target mirrors (TM) and two plates, was mounted on a stage as a measuring object in situ situation
The displacements of the 6DOF motion errors of MP could be measured by counting the number of the interference fringes due to the two laser beams
Summary
Six Degree-of-freedom (6DOF) motion errors of a linear stage of a machine tool, a coordinate measuring machine and so on should be measured simultaneously in order to improve their accuracies. It is difficult to measure 6DOF motion errors simultaneously because the stages have no enough space to setup conventional measuring instruments such as displacement sensors and autocollimators. It is expected to develop the measuring instrument that can simultaneously measure the 6DOF motion errors. The system proposed in [6,7] can measure 6 DOF motion errors in only one direction. The system can be expanded to measure the 6 DOF motion errors in bidirection
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