Abstract
Radius of curvature is one of the key parameters of optical components. A variety of methods have been developed for this measurement. This paper describes a novel way, named “CMM spherometry by probe compensation”, to measure the radius of curvature of optical surfaces by coordinate measuring machine (CMM). The measurement combines CMM measurement and iteration calculation scheme is presented. The measurement results of CMM and the trace samples are compared. The effect of temperature compensation is discussed.
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