Measurement of QCM Mass Sensitivity Based on Electrodeposition

Abstract

In this paper, we used a practical method to calculate the mass sensitivity of quartz crystal microbalance (QCM) based on electrodeposition. The QCMs were used widely due to their high mass sensitivity. Therefore, the measurement of QCM mass sensitivity is a vital research direction. The atomic force microscopy (AFM) and X-ray diffraction (XRD) measurements for deposited copper films on the electrode surface were carried out. We calculated three samples of AT-cut 10MHz quartz crystal resonators, and their mass sensitivities were 2.92 × 10 −9 g/cm 2 ·Hz, 3.21 × 10 −9 g/cm 2 ·Hz and 3.52 × 10 −9 g/cm 2 ·Hz. This practical method is helpful to calculate the mass sensitivity of QCM, and it can be extended to calculate other structure QCMs.