Abstract
The principle of small‐angle neutron scattering (SANS) contrast variation is applied to characterization of nanoporous low‐k thin films. Pores are filled with mixtures of the hydrogen‐ and deuterium‐containing analogs of a probe solvent by vapor adsorption. By varying the composition of the solvent in the pores, a “contrast match” solvent composition is identified for which the scattered intensity is minimized. The contrast match solvent mixture is subsequently used to conduct SANS porosimetry experiments. In combination with information from X‐ray reflectivity and ion scattering, the technique is useful for estimating the density of the matrix (wall) material and the pore size distribution. To illustrate the technique, a porous methylsilsesquioxane (MSQ) spin‐on dielectric is characterized.
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