Abstract
This paper discusses applying different voltages and pressure in the presence of silver target and argon gas to produce plasma. Home-made dc magnetron sputtering system was used to produce glow discharge plasma. The distance between two electrodes is 4 cm. Gas used to produce plasma is argon that flows inside the chamber with flow rate 40 sccm. Intensity of spectral lines, electron temperature and electron density were studied. The results show that the intensity of spectral lines increases with the increase of the working pressure and applied voltage. Electron temperature increases by the increase of applied voltage but decreases with the increase of working pressure, while electron density decreases with the increase of applied voltage and increases with the increase of working pressure. This research demonstrates a new low cost approach to start producing high corrosion resistance materials.
Highlights
The results show that the intensity of spectral lines increases with the increase of the working pressure and applied voltage
Magnetron sputtering has gained wide acceptance in both research and commercial purposes and is routinely used in different industries like cutting tools, forming tools, semiconductor, optical glass coating, decorative, biomedical, and tribology applications[6] glow discharge is produced by applying an electric potential on a gas sample between two electrodes placed inside a vacuum chamber .This glow discharge is a common source of plasma that can be established through an avalanche like ionization of gas neutrals at specific conditions for gas pressure and applied voltage [7]
Glow discharge plasma can generate in magnetron sputtering system, which are extensively used in various applications such as modification of surfaces [8], [9]
Summary
Which are not required to an atom or molecules [1], [2] It have free charge particles where the positive and negative charge approximately stasis each other at the level of the macroscopic. When the environment temperature increasing the division of atoms can be break down in to negative charge electron and positive charge ion These particles will contact with each other through the electromagnetic [3], [4]. Optical emission spectroscopy (OES) is using to measure and analysis plasmas radiation to get perception in to the plasma. The Optical emission spectroscopy (OES) can investigate very small plasmas, often smaller as probes themselves. The temperature of electron and the density of electron obtained by the following equation respectively: I1
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