Abstract
Moire interferometry is a method of measuring submicron displacement distribution using two or four collimated beams incident to the specimen diffraction grating. In this paper, in order to form these two or four beams, a transparent diffraction grating is used. Two types of transparent-type diffraction moire interferometry are developed. One uses oblique incident beams for measuring one-dimensional displacement. The other uses normal incident beams for measuring one-or two-dimensional displacement components. In the latter, the 0th-order diffraction beam is noise. This noise is removed using a light control plate which was developed recently. By using this diffraction moire interferometry, a compact system for microdeformation measurement is developed.
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