Measurement of low-pressure Knudsen force with deflection approximation for gas detection

Abstract

In this paper, experimental examinations are done to evaluate the thermal Knudsen force in Knudsen gauge at low-pressure condition. This work has focused on the simple technique to visibly observe the induced Knudsen force as main parameter which could be used in the micro sensor for gas detection in rarefied condition. In order to do this, the simple micro channel with presence of copper wire as hot element with a flexible element is prepared to observe the effect of the Knudsen force on the change of the degree of the flexible arm. This study investigates the effect of the pressure and temperature difference of element on the variation of the Knudsen force in the low-pressure condition. DSMC simulations are also done to confirm and evaluate the obtained results. Our findings show that proposed technique presents reasonable results and clearly demonstrates the effect of the Knudsen thermal force in the rarefied gas.