Abstract
Surface forces play a crucial role in the contact behavior of micro-components as well as the application of MEMS products. In this study, a microscopic measurement system based on multiple beam interferometry is developed to measure the adhesive force between two mica thin films. The contact area on the mica can be determined from the FECO fringes. A double cantilever spring is used to measure the adhesive (pull-off) forces between the two mica thin films. The usefulness of the adhesive force measurement system is validated by comparing with the result from JKR contact theory.
Highlights
In nano-scale, physical and mechanical properties of materials will show a significantly different characteristics and phenomena
Friction forces play a crucial role in the tribological behavior of microcomponents and the application of MEMS products
A microscopic measurement system based on multiple beam interferometry is developed to measure the friction force between two mica thin films
Summary
In nano-scale, physical and mechanical properties of materials will show a significantly different characteristics and phenomena. The establishment and use of precision measurement technology and system become an important part to understand and to effectively control the materials, structures or installations in nano-scale. It is necessary to develop a measurement system to understand and control the material characteristics. Various techniques such as Auger and X-ray photoelectron spectroscopy, scanning electron microscopy were coupled with tribometer to study the contact between two shearing surfaces in ultrahigh vacuum. Further use of MBI for in situ imaging of shearing contacts of two shearing surfaces at the same time as friction forces are measured was reported [3]. A microscopic measurement system based on multiple beam interferometry is developed to measure the friction force between two mica thin films.
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