Abstract
Dc current-voltage (I-V) measurement, Hall measurement, Deep-level transient-spectroscopy (DLTS), and flatband capacitance measurement have been used to investigate electrical activation energies in diamond. However, the deviations still exist in the published activation energies obtained by these methods. In this paper, we report the first measurement of impedance on free-standing diamond films from 0.1Hz to 10MHz up to 300°C. A wide range of CVD materials have been investigated, but here we concentrate on 'black' diamond grown by MWPECVD. The Cole-Cole (Z′ via Z″) plots are well fitted to a RC parallel circuit model and the equivalent Resistance and Capacitance for the diamond films have been estimated using the Zview curve fitting. The results show only one single semicircle response at each temperature measured. It was found that the resistance decreases from 62 MΩ at room temperature to 4 KΩ at 300°C, with an activation energy around 0.15eV. The equivalent capacitance is maintained at the level of 102 pF up to 300°C suggesting that the diamond grain boundaries are dominating the conduction. At 400°C, the impedance at low frequencies shows a linear tail, which can be explained that the AC polarization of diamond/Au interface occurs.
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