Measurement of discontinuous surfaces using multiple-wavelength interferometry

Abstract

Interferometric surface profilers using a single wavelength offer excellent vertical resolution, but have an ambiguity-free range of less than half a wavelength. Multiple-wavelength or white light interference techniques are used to overcome the problem. We discuss a three-wavelength interferometric technique used with a phase-shifting phase evaluation procedure. The phase evaluation at the three wavelengths gives wrapped phase at any pixel corresponding to these wavelengths. We use the fact that the variation of phase with wavenumber for a given profile height is linear to determine the absolute value of the profile height. The height is then used to ascertain the fringe order. The fringe order, along with the wrapped phase, gives the profile height with a resolution given by the phase-shifting technique. Experimental results for large step height measurement on etched silicon samples are presented.