Abstract
A method for measuring diameters of metal cylinders is proposed. In this method a sinusoidally vibrating interference pattern (SVIP) of 100μm-period is used to generate an exact spatial scale along x-axis. Detection of the amplitude and the phase of the SVIP are carried out easily and exactly with sinusoidal phase-modulating interferometry. First, phase values of the SVIP on the pixels of the CCD image sensor are measured as the exact scale along the x-axis. Next, an image of the end-points of the cylinder surface is formed by extracting lights from the end-points of the cylinder. The phase of the SVIP on the end-point of the cylinder appears at a position where the amplitude of the image has maximum value along the x-axis. The x-coordinate of the end-point of the metal cylinder is calculated from the phase value of the end-point and the exact scale. The diameter is obtained from the x-coordinates of the two end-points. Metal cylinders of 9mm and 8mm-diameters are measured with an error of about ±2μm.
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