Measurement of attitude angles of single stator multi-degrees of freedom ultrasonic motor

Abstract

In order to measure the attitude angles of our ultrasonic motor, a compact single stator multi-degree-of freedom (DOF) ultrasonic motor with a cylindrical stator and a spherical rotor is designed with one OEM encoder and 2D PSD (Position Sensitive Detector) sensor. The spherical rotor is rotated around three perpendicular axes by three natural vibrations excited on the stator. The OEM encoder disc is fixed on the rotor output shaft to measure the rotational angle of the output shaft. The PSD sensor is installed in loading sphere, and one LED is installed in the LED house, the line light emitted by the LED transmits along the output shaft axis and passes through the center of the spherical rotor, and then projects on the PSD surface, and the PSD and LED comprise the device to measure the pitch and roll of the rotor. The output current signals of the PSD sensor are changed into voltages, amplified by measuring circuits, converted into digital signals, and are transmitted to MCU. The attitude angles of the motor are calculated out using the proposed algorithm. The compact structure design of the motor makes the measurement of the attitude angles of the multi-DOF ultrasonic motor more practical and convenient.