Measurement of angular displacement by compact mechanical structure based on laser interference system

Abstract

Laser interference system has been extensively applied in high-precision geometric metrology benefit from the advantages of high accuracy, high resolution and stability in linear displacement measurement. In this paper, we present a novel and compact mechanical structure to realize the conversion between angular and linear displacement, so that the slight angular displacement can be enlarged and obtained by using the characteristics of high-precision linear displacement measurement of laser interference system. A series of experiments are carried out on this device, the conversion ratio of angular and linear displacement we achieved is 5.76 arcsec/ μm, which is determined by the transmission ratio of the worm gear pair and the pitch of the ball screw. By comparing the measured angular values with 23 reference values distributed on the whole circumference, the maximum original error of angular displacement measurement in this system without correction or compensation is ± 25 arcsec and the resolution is 0.6 arcsec.