Measurement-Based Extraction and Analysis of a Temperature-Dependent Equivalent-Circuit Model for a SAW Resonator: From Room Down to Cryogenic Temperatures

Abstract

This article provides for the first time a very extensive experimental characterization coupled with a fully analytical modeling in order to investigate, in a systematic and comprehensive way, the sensing performance of a two-port surface acoustic wave (SAW) resonator from room down to cryogenic temperatures. The motivation behind this work is twofold: to quantitatively assess the temperature sensitivity of the SAW technology for cryogenic applications and to gain a better understanding of the underlying physics in terms of the equivalent-circuit elements. Although the measurement-based analysis is developed by focusing on a SAW from Murata as a case study, the developed investigation methodology is independent of the considered technology and extensible to other SAW types. A cryogenic system based on a closed-loop helium refrigerator is used to cool the tested SAW from 300 K down to 20 K with a step of 10 K. At each studied temperature, the scattering parameters are measured using a vector network analyzer over a narrow frequency band around the nominal resonant frequency of 423.2 MHz, spanning from 420 MHz to 425 MHz with a small step of 3.125 kHz. The measured scattering parameters are then transformed into the admittance ones, as they are more useful for sensing performance assessment and for equivalent-circuit model extraction. The extracted model is successfully validated through the achieved good agreement between measurements and simulations of the temperature- and frequency-dependent behavior of the studied resonator.