Abstract
A microsphere measurement system based on dual scanning probe microscopes is presented, and the ruby microsphere of a Renishaw commercial stylus used for micro-coordinate measuring machines is measured. The main errors in the measurement are separated and corrected, and the uncertainties of the measured diameter and sphericity are evaluated using the Monte Carlo method. The results indicate that the microsphere diameter is 304.319 µm with an expanded uncertainty of 0.027 µm (k = 2), and its sphericity is 0.124 µm with an expanded uncertainty of 0.041 µm (k = 2). The measured dimensions of the commercial ruby sphere are consistent with the DIN standard 5401:2002, and the measurement results are accurate and reliable.
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