Abstract
AbstractSolvent concentration is an important factor for spin‐coated film planarization. Two techniques, one an on‐line optical method and the other an off‐line gel permeation chromatography method, have been used to investigate the coating concentration change during spinning. The experimental observations are compared with the spin‐coating model predictions. The modeled concentration and thickness are in close agreement with experiment. Under certain conditions, the spin‐coating model can be significantly simplified. These conditions are discussed.
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a callDisclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.
