Abstract
Diffractive optical elements (DOEs) play an important role in improving imaging quality and reducing system volume. The measurement of DOE surface topography is of great significance to the evaluation of DOE quality and the optimization of its manufacturing process. However, there are still some difficulties in measuring the large curvature and the large sag of curve-based DOEs. In this paper, considering the geometrical feature information and measurement problems of curve-based DOEs, a measurement method based on a confocal measurement principle for DOE measurement is proposed. The proposed measurement data processing method is verified by a high-precision motion axis system and the stability of an ultra-precision lathe. The results show that the proposed measurement method can reconstruct and accurately evaluate the three-dimensional surface topography of DOEs.
Highlights
Diffractive optical elements (DOEs) are new optical elements based on the principle of light diffraction
The optical axis of the probe was aligned with the center of the DOE vertex deviation of the measurement path after registration that was not aligned with the center of the by means of multiple registration iteration optimization
The results show that the measurement method can effectively realize the complete measurement of the feature information of the curve-based DOE
Summary
Diffractive optical elements (DOEs) are new optical elements based on the principle of light diffraction. The early form of DOEs was binary optical elements, which are usually used for laser shaping. For a specific wavelength of incident laser, the microstructure of the DOE surface is designed, and the energy and phase of laser are adjusted to achieve the desired output spot pattern. The Fresnel lens is a typical DOE element, and is usually a rotational symmetric element composed of a series of concentric rings. By designing a “step” at a specific phase mutation point, the diffraction efficiency of the optical system can be improved. The DOEs can be considered as being created by removing slabs of material that do not contribute to the bending of the light rays to a focal point
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