Measurement and analysis of surface profiles by inverse scattering method

Abstract

Evaluation and measurement of surface profiles are very important especially to short wavelength optical research. A linear system treatment of short-wavelength surface scattering theory is introduced, and based on this, a new inverse scattering mathematical model of soft X-ray grazing incidence optics is established. By using these scattered light distributions of super-smooth surfaces measured by a soft X-ray reflectometer, the surface profiles of super-smooth surfaces are computed by means of inverse scattering mathematical model of soft X-ray grazing incidence optics. The calculating results are in accordance with those measured by WYKO. It can be concluded that the soft X-ray grazing incidence optical scattering method can calculate micro-roughness and surface auto correlation function of smooth surface accurately, and can give optical surface profiles intuitively.