Abstract
We investigated the structural and magnetic properties of Co2FeAl0.5Si0.5 (CFAS) full-Heusler alloy thin films deposited on Si/SiO2/(001)-oriented MgO strucutre by molecular beam epitaxy. The MgO layer deposited at 300°C grew with an enough (001)-orientation to obtain high spin polarization on Si/SiO2 substrate. The CFAS thin films on Si/SiO2/(001)-oriented MgO structure showed only (220) peaks in XRD measurements. However, those films also showed high magnetization, same as the magnetization of L21-ordered CFAS on MgO substrates. Therefore, it is considered that the CFAS thin films on Si/SiO2/(001)-oriented MgO structure have the high ordered structure.
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