Maximum 300-W high-power excimer laser

Abstract

A 200-watts average power excimer laser with excellent output energy stability has been developed. The improved laser oscillator can keep an output of 200 watts (667 mJ/pulse, 300 Hz) with servo operation over 25 million pulses. During the operation, the output stability is less than 1.5% for 1-(sigma) and less than 10% for peak to peak value. We have just started to improve the pulsed power circuit for excitation. At first the numerical simulation is executed about this pulsed power circuit using PSpice simulator. The experimental results are in good agreement with the simulation results. The special capacitance transfer method is used for this pulsed power circuit. The result shows that this energy transfer is not enough at the high input voltage. The improvement of the magnetic assist circuit by making full use of the simulation result leads to the complete energy transfer. It is possible for this laser to produce almost 300 watts (1 J, 300 Hz) in the largest output power. Experimental and theoretical studies of various parameters governing the laser performance are used to improve further. It is expected that higher power laser output is produced to be applied for practical use.