Abstract

Iterative learning control (ILC) has been extensively used in systems that repeatedly follow the same desired trajectory. The key idea is to incorporate the tracking errors from previous iterations to generate a better feedforward signal for the next iteration. A drawback of ILC is that all disturbances are assumed to be repetitive, while in practice non-repetitive disturbances may also affect the system behaviors. To address this problem, many efforts have been made on designing Q-filters to filter out the non-repetitive effects from the error signal. This paper presents a nonparametric Q-filter design procedure which does not require any explicit specification of the properties of non-repetitive disturbances. Namely, we perform matrix factorization on a set of error signals in the time-frequency domain to construct a non-repetitive error dictionary. The learned dictionary is then used to encode the error signal in each ILC iteration. This in turn results in a low-rank matrix and a sparse matrix that, respectively, describe the undesired non-repetitive effects and the desired repetitive effects. The effectiveness of the proposed method is demonstrated on a laboratory testbed wafer scanner.

Full Text
Paper version not known

Talk to us

Join us for a 30 min session where you can share your feedback and ask us any queries you have

Schedule a call

Disclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.