Abstract
In this study, a hybrid mathematical model of a low-pressure RF plasma jet in transition mode between continuum and free molecular flow at a Knudsen number of 8·10−3 ≤ Kn ≤ 7·10−2 for a carrying gas is described. The model takes electrons, ions, metastable atoms, and potential and curl electromagnetic fields into account. The model is based on both a statistical approach for the atoms in the ground state and a continuum model for other components. The results of plasma flow calculations in an undisturbed jet are described. The distributions of the electrodynamic and electrostatic parts of the electric field are given. It has been observed that the plasma jet has a layered structure along the stream: a positive charge region is formed at the beginning of the jet, followed by a negative charge region, and then a positive one again. The reason for the formation of a layered structure is the fast flow expansion when the plasma inflows into the vacuum and the difference in electron and ion pulse.
Highlights
RF plasma at low pressures (0.15–150 Pa) is used for the modification of various materials such as metals, polymers, and composites [1,2,3,4,5]
The present paper aims in constructing a model of low-pressure ICPRF plasma to analyze the role of electrons and ions in sustaining the discharge, taking into consideration the interaction with electromagnetic field
The electrodynamical part of the electrical field is decreased approximately just as the electrostatic potential is decreased to a weaker level with distance from the inlet
Summary
RF plasma at low pressures (0.15–150 Pa) is used for the modification of various materials such as metals, polymers, and composites [1,2,3,4,5]. E spatial distribution of metastable particles in the jet of an inductive coupled RF at low pressure was studied in [15]. Because the jet of a low-pressure RF plasma contains a factor of capacitively coupled discharge, it is interesting to investigate the effect of the capacitive component on the distribution of charged particles and the electromagnetic field in the plasma. In this regard, the present paper aims in constructing a model of low-pressure ICPRF plasma to analyze the role of electrons and ions in sustaining the discharge, taking into consideration the interaction with electromagnetic field
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