Mathematical Modeling and Numerical Simulation of a Single-Turn MEMS Piezoresistive Pressure Sensor for Enhancement of Performance Metrics

Abstract

Micro-Electro-Mechanical System (MEMS)-based pressure sensors operating on the principle of piezoresistivity have found profound application in various fields like automobile, aerospace, aviation, biomedical and consumer electronics. Various research studies have been conducted to optimize the design of MEMS-based pressure sensors to meet specific requirements of different fields. Modification in the structure of the piezoresistors placed on these sensors has shown great effect in this regard. However, most of these improvements have been validated through fabrication and measurement, but there has been a lack of significant studies developing analytical models to explain these improvements. This paper studies the performance of a single-turn piezoresistor design on a square silicon diaphragm. The analytical model relates the dimensions of the single-turn piezoresistor on a square diaphragm to the output voltage, and hence, sensor sensitivity is laid out. The correctness of the relation is also validated through Finite Element Analysis (FEA) performed using COMSOL Multiphysics software. Hence, an optimized single-turn design is presented which achieves a sensitivity of 203.57[Formula: see text]mV/V/MPa over a pressure range of 0–1[Formula: see text]MPa. These results are then compared to work from existing literature. The comparison shows an improved performance which was achieved by optimizing the design through its derived analytical model. The proposed sensor can be utilized in disposable blood pressure measurement system where high sensor sensitivity is required.